The optical, structural and electrical properties of DC magnetron sputtered Al-1%-Si alloy
The use of aluminium alloy films, and in particular Al-1%-Si, is common in many microelectronic interconnection schemes. Specular reflectivity and sheet resistance measurements are often used to characterise the deposited film. These and other properties, such as electromigration resistance, are dep...
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University of Surrey
1990
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.253385 |