Performance enhancement of the Surrey 400 keV ion implanter
Performance enhancement of the Surrey 400 keV ion implanter has been successfully implemented by upgrading the ion optics and installing a computerised telemetry system. Ion optics improvements include redesigning the mass analyser system and designing and installing a double electrostatic quadrupol...
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University of Surrey
1990
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.253782 |