Ion beam applications in silicidation processes of Siâ†1â†-â†xGeâ†x layers
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Published: |
University of Surrey
1998
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Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.264292 |
Main Author: | |
---|---|
Published: |
University of Surrey
1998
|
Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.264292 |