Ion beam applications in silicidation processes of Siâ†1â†-â†xGeâ†x layers

Ion beam applications in silicidation processes of Siâ†1â†-â†xGeâ†x layers

Bibliographic Details
Main Author:	Curello, Giuseppe
Published:	University of Surrey 1998
Subjects:	530.41 Solid-state physics
Online Access:	http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.264292

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