Characterisation of thin films of silicon rich oxides

The electrical characteristics of a Metal-Semi-insulator-Semiconductor diode have been comprehensively studied at various temperatures. In particular the electrical, structural and compositional properties of the semi-insulator, silicon-rich-oxide (SRO), have been thoroughly investigated. The SRO fi...

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Bibliographic Details
Main Author: Maughan, Esther
Published: Durham University 1998
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.264733