The growth and evaluation of epilayers grown by silicon molecular beam epitaxy
The aim of this work was to evaluate and improve the quality of epilayers grown by silicon molecular beam epitaxy (Si-MBE). The first thorough study was carried out on substrate preparation, specifically aimed at the unique conditions that arise during MBE growth. This included both ex-situ wet chem...
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University of Warwick
1991
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.304234 |