Design and fabrication of a miniature silicon microphone
Silicon micromachining techniques were developed and used to batch fabricate a new type of heavily doped p-type (or p") silicon etch stop structure on glass that could be suitable for implementation of a condenser microphone. This involved study, development and use of techniques such as mask d...
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De Montfort University
1995
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.391085 |