Modelling of silicon oxidation processes

Modelling of silicon oxidation processes

Bibliographic Details
Main Author: Szymanski, Marek Artur
Published: University College London (University of London) 2001
Subjects:
537.622
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.395532

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.395532

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