High quality high current ion beam generation and transport systems including plasma-based space charge neutraliser
This thesis discusses the development of an ion beam generation and transport system for the purpose of high current ion implantation and presents a method to achieve high quality beam generation and high transport efficiency. An advanced method of achieving ideal space charge neutralization of an i...
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University of Salford
2003
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.400772 |