Atmospheric pressure plasmas for surface modification

Many methods are currently used for the production of silicon oxide films, most have drawbacks associated with high temperatures and the requirement for a vacuum. Atmospheric pressure plasma treatment can address some of these difficulties. Air silent discharge treatment of spin-coated organo-silico...

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Bibliographic Details
Main Author: Ward, Luke John
Published: Durham University 2001
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.422489