Langmuir probe characterisation of ion source plasmas
The precise conditions under which ions are generated in the ion source can have a major impact on how well the source performs, and how much of the extracted beam current can be transported. Because of the commercial focus on the repeatability and reliability of the overall ion implantation process...
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University of Surrey
2005
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.422936 |