A tunable micro-electro-mechanical optical filter in silicon
Main Author: | |
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Published: |
Imperial College London
2007
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Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.441291 |
Main Author: | |
---|---|
Published: |
Imperial College London
2007
|
Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.441291 |