Ion bombardment sputtering of gallium arsenide, gold and tantalum
Sputtering yields have been measured for neon, argon and krypton sputtering of gold and for argon and tellurium sputtering of gallium arsenide in the energy range from 50 to 400 keV. Values of yields, estimated by activation analysis of sputtered deposits, are compared with other experimental result...
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University of Surrey
1979
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.472835 |