Proton beam writing in gallium arsenide
Proton Beam Writing (PBW) is a direct write technique that employs a focused MeV proton beam which is scanned in a pre-determined pattern over a target material which is subsequently electrochemically or chemically etched and developed. The ultimate depth of the structure is determined by the range...
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University of Surrey
2008
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.486049 |