Novel components by magnetron sputtering
The advent of the closed field unbalanced magnetron sputtering (CFUBMS) technique has provided a novel method for the production of ultra thick multilayer coatings, which form free standing foils when removed from the substrate. Applications for this method range from the production of complex metal...
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University of Salford
2005
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Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.491045 |