Deactivation of non-melt laser annealed boron ultra-shallow junctions
The demand for faster, smaller and cheaper electronic devices such as mobile phones and mp3 players, together with Moore's law, are the driving forces behind the miniaturisation of transistors in silicon-based processors and memory. As the aggressive downscaling of the transistors continues, st...
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University of Surrey
2007
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.493213 |