RF MEMS Switches for high power applications

This thesis introduces a new concept in 3D RF MEMS switches intended for power applications. The novel switch architecture employs electrothermal hydraulic microactuators to provide mechanical actuation and 3D out-of-plane silicon cantilevers that have both spring action and latching mechanisms. Thi...

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Bibliographic Details
Main Author: Choi, Joo-Young
Published: Imperial College London 2009
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.501423