Optical & structural properties of ion beam fabricated amorphous and polycrystalline iron disilicide
The dependence of the optical and structural properties of amorphous and polycrystalline FeSi2 layers fabricated by ion beam sputter deposited (IBSD) FeSi2 and ion beam mixing (IBM), have been characterised. Amorphous and polycrystalline FeSi2 were fabricated using IBSD of Fe and Si at deposition te...
| Main Author: | |
|---|---|
| Published: |
University of Surrey
2010
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.510560 |