Long-range lateral dopant diffusion in tungsten silicide layers

Long-range lateral dopant diffusion in tungsten silicide layers

Bibliographic Details
Main Author: Liao, Sheng Zhou
Published: Queen's University Belfast 2011
Subjects:
621.3
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.534690

Internet

http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.534690

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