Mechanical systems in nanometre metrology
The work reported in this thesis was carried out in the School of Engineering Science, University of Warwick, between October 1984 and October 1987. Chapter 1 contains a review of recent developments in instrumentation that require both manipulation and measurement over the range 0.1-100nm. The inst...
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University of Warwick
1987
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.541229 |