Mechanical systems in nanometre metrology
The work reported in this thesis was carried out in the School of Engineering Science, University of Warwick, between October 1984 and October 1987. Chapter 1 contains a review of recent developments in instrumentation that require both manipulation and measurement over the range 0.1-100nm. The inst...
Main Author: | Smith, Stuart T. |
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Published: |
University of Warwick
1987
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Subjects: | |
Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.541229 |
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