Synthesis, chemical vapour deposition and structural studies of group 13 alkoxides
This work is concerned with the synthesis of precursors to group 13 oxide thin films, and the subsequent chemical vapour deposition (CVD) of group 13 mixed metal oxide films. Investigations into the mechanisms at work during their decomposition via various techniques including gas phase electron dif...
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University College London (University of London)
2010
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.564962 |