Fabrication of deep-etched Distributed Bragg Reflectors in AlGaInP GaAs laser stuctures
This thesis describes work undertaken to understand the physics of dry-etching AlGaInP/GaAs laser structures in Cl-based plasmas to develop a process that allows the fabrication of high-aspect-ratio, sub-micron features. The effects of the main process parameters on the etch rate, selectivity and po...
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Cardiff University
2007
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.584102 |