Electro-thermo-mechanical study of membrane devices for smart IC technologies
Silicon on Insulator membranes are increasingly finding applications in many semiconductor devices and circuits. This thesis studies thermal and mechanical behaviour of two very different membrane based devices: Smart Gas Sensors and Membrane Power Devices. Both the devices are CMOS compatible and c...
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University of Cambridge
2008
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.595441 |