Magnetic MEMS actuators

Magnetic MEMS actuators are presently still relatively under-researched as compared to their electrostatic, piezoelectric and electro-thermal counterparts. Most existing magnetic MEMS actuators are limited to simply delivering a rotational output. The research presented in this thesis aims to develo...

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Bibliographic Details
Main Author: Cao, J.
Published: University of Cambridge 2010
Subjects:
620
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597277