Hydrogenated tetrahedrally bonded amorphous carbon for electronic applications
This thesis examines the properties of hydrogenated tetrahedrally bonded amorphous carbon (ta-C:H) grown using a plasma beam source(PBS) and assesses its potential as a semiconductor material for electronic applications. Production of high quality ta-C:H requires optimisation of the deposition condi...
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University of Cambridge
1999
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.597911 |