MEMS : the fabrication of microsystems on silicon
This thesis explores silicon MEMS in two areas, the field of physical sensors and MEMS in biotechnology. The emphasis is on simple fabrication, novel fabrication techniques, evaluation of recent silicon-based materials and up-to-date MEMS applications. First, bonded silicon-on-insulator material (SO...
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University of Cambridge
1999
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.598267 |