Plasma diagnostics and spectroscopy using tuneable IR diode lasers

The first section of this dissertation is directed towards understanding the chemistry of free radicals and other discharge products in low pressure methane and mixed methane plasmas. The behaviour of the discharge products in a 10 kHz parallel plate reactor was investigated through IR diode laser a...

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Bibliographic Details
Main Author: Fan, W. Y.
Published: University of Cambridge 1998
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.598934