Microcrystalline silicon thin film transistors made by plasma enhanced chemical vapour deposition
Currently the transistors required for active matrix liquid crystal displays (AMLCDs) are fabricated using hydrogenated amorphous silicon (a-Si:H) owing to its large area capability and compatibility with a wide range of low cost substrates. Future displays will however require a material with a hig...
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University of Cambridge
1998
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.599237 |