Modelling of polymer dissolution and the development of electron resists
| Main Author: | |
|---|---|
| Published: |
University of Cambridge
2002
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| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.620422 |
| Main Author: | |
|---|---|
| Published: |
University of Cambridge
2002
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.620422 |