Modelling of the interactions of Cu and rare earth metal with Si(001)

Cu is one of the most detrimental impurities to the Si devices. A theoretical investigation into diffusing interstitial Cu (Cuj) in Si and the interactions of Cu with other impurities and defects of the host lattice is strongly desired in order to understand and control the reaction paths of this im...

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Bibliographic Details
Main Author: Ehlers, F. J. H.
Published: University College London (University of London) 2008
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.625150