Coherent X-ray diffraction imaging and ptychography on silicon-on-insulator nanostructures

My PhD project is on the use of coherent X-ray diffractive imaging (CDI) techniques to study strained Silicon-On-Insulator (SOI) and Strained-Silicon-On-Insulator (SSOI) nanostructures, which include nanowires and microsquares. To understand and distinguish SOI wafer properties and compare and analy...

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Bibliographic Details
Main Author: Shi, X.
Published: University College London (University of London) 2013
Subjects:
500
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.626146