Focused-ion-beam growth of nanomechanical resonators
Nanoscale mechanical resonators exhibit excellent sensitivity and therefore potential advantages for application as ultrasensitive mass sensors by comparison with micromachined cantilevers. We fabricated three dimensional vertical C-W-nanorods on silicon substrates by focussed ion beam induced depos...
| Main Author: | |
|---|---|
| Other Authors: | |
| Published: |
University College London (University of London)
2014
|
| Subjects: | |
| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.626723 |