Contacts and ion implantation to 4H silicon carbide

Rectifying and non-rectifying contacts were fabricated in n-type 4H-Silicon Carbide. To improve the characteristics of the fabricated contacts various different surface pre-treatments were used. The impact of these pre-treatments on both contacts types was evaluated, and any improvements recorded. T...

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Bibliographic Details
Main Author: Pope, G.
Published: Swansea University 2004
Subjects:
537
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.638549