Fabrication and nano-scale characterisation of ferroelectric thin films
This thesis focuses on the fabrication and characterisation of BaTiO3 thin films. One of the aims is to deposit amorphous BaTiO3 films on conductive thin films through sputtering at temperatures compatible with semiconductor manufacturing, followed by post deposition annealing to crystallise these f...
| Main Author: | |
|---|---|
| Published: |
University of Newcastle upon Tyne
2014
|
| Subjects: | |
| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.644565 |