Characterisation of micromechanical materials and MEMS structures using optically generated ultrasound
Due to the increased commercial demand for miniaturisation, MEMS manufacturers have to characterise their components to improve quality control with ever-higher accuracy and resolution. One method of characterisation, using laser-generated and detected ultrasonic Lamb waves, is described in this the...
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University of Strathclyde
2014
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.644872 |