Fabrication, characterisation and tuning of micromechanical resonators
Both polysilicon bridge and beam resonators have been fabricated and characterised. In addition, a CMP planarisation based process has been used to demonstrate a fabrication platform for producing micromechanical resonators with submicron transducer gaps. This process requires one photolithographic...
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University of Edinburgh
2006
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.650021 |