Computer instrumentation for voltage contrast measurement in the scanning electron microscope
The scanning electron microscope is widely used in industry as a tool in both development and production stages of integrated circuit manufacture, firstly for very high magnification topographical inspection of circuits and secondly for various diagnostic techniques in which the electron beam intera...
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University of Edinburgh
1990
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.660129 |