Harnessing the non-linear coupling of odd harmonics for control of charged particle dynamics in radio-frequency plasmas
Over the past number of years multiple frequency capacitively coupled plasmas have achieved widespread usage in plasma based nano-fabrication. However,the control of charged particle dynamics in such discharges is often limited by poor understanding of the non-linear coupling between the frequencies...
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Queen's University Belfast
2015
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.680121 |