A MEMS sensor for stiffness change sensing applications based on three weakly coupled resonators
Micro-electro-mechanical (MEM) resonator devices have been widely used to sense small changes in the properties of the resonator, namely the stiffness and mass of the resonator. Among these, sensing devices that detect stiffness change have been employed for many applications, including acceleromete...
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University of Southampton
2016
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.680781 |