Deposition & characterisation of silicon and conductive layers on woven polyester
Textile and semiconductor processes were combined to produce a flexible solar panel by depositing silicon thin film onto woven polyester. Semiconductor processes such as evaporation, Plasma Enhanced Chemical Vapour Deposition (PECVD) and RFsputtering were done under vacuum conditions. Microwave PECV...
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Heriot-Watt University
2013
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.686122 |