Rotary micro-ball bearing designs for MEMS applications
Micro-electro-mechanical systems (MEMS) technology allows the fabrication of small mechanical systems in silicon using standard micro-fabrication pro- cesses. MEMS techniques have found wide acceptance in such devices as ac- celerometers, micro-mirrors, resonators, probes, and micro-tweezers to name...
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Imperial College London
2013
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| Online Access: | http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.693955 |