Micro-sensors utilising the mode-localisation effect in electrostatically coupled MEMS resonators
In response to a perturbation, the stiffness or mass of a MEMS resonator can change and previous research has utilised the resonant frequency shift to characterise the perturbation, be it strain or acceleration altering the resonator stiffness or the attachment of a biological element altering the r...
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University of Southampton
2016
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.694508 |