Experimental investigation of carrier mobility degradation in metal oxide semiconductor field effect transistors of high permittivity gate dielectrics

Scaling of electronic devices is driven, from the consumption side, by the need for compact electrical products, increase in device speed and from the production side, by lowering of production cost. However, aggressive scaling gives rise, among others, to high gate tunnelling currents in contempora...

Full description

Bibliographic Details
Main Author: Atarah, Samuel
Published: De Montfort University 2006
Subjects:
Online Access:http://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.702058