Thermoelastic damping and support loss in MEMS ring resonators
Micro Electro-Mechanical Systems (MEMS) rate sensors are inertial devices based on a resonating structure to measure and detect rate of angular rotation. For applications requiring high performance angular rate measurements it is important to be able to design MEMS rate sensors with high quality fac...
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University of Nottingham
2016
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.713890 |