Total ionizing dose response of high-k dielectrics on MOS devices

As advanced Metal Oxide Semiconductor Field Effect Transistors (MOSFETs) technology continues to minimize the gate oxide thickness, the exponential increase in gate leakage current poses a major challenge for silicon dioxide (SiO2) based devices. In order to reduce the gate leakage current while mai...

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Bibliographic Details
Main Author: Mu, Y.
Published: University of Liverpool 2017
Subjects:
Online Access:https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.722107