Synthesis and evaluation of new molecular precursors for the chemical vapour deposition of electronic materials
MCl<sub>3</sub> (M = Sb, Bi) react with E<sup>n</sup>Bu<sub>2</sub> (E = Se, Te) to form [MCl<sub>3</sub>(E<sup>n</sup>Bu<sub>2</sub>)<sub>3</sub>], which are effective single source precursors for the low pressure c...
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University of Southampton
2018
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.749804 |