Development of a low-debris laser driven soft X-ray source for lithographic applications
This work comprehensively describes the design, build and characterisation of a low-debris laser driven soft x-ray source for a variety of applications in particular lithography, in combination with the optimized multilayer structures in order to use the source output as efficiently as possible. The...
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Imperial College London
2016
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| Online Access: | https://ethos.bl.uk/OrderDetails.do?uin=uk.bl.ethos.754664 |