Adaptive optics wavefront compensation for solid immersion microscopy in backside imaging
Thesis (Ph.D.)--Boston University === This dissertation concerns advances in high-resolution optical microscopy needed to detect faults in next generation semiconductor chips. In this application, images are made through the chips' back side to avoid opaque interconnect metal layers on the fron...
| Main Author: | |
|---|---|
| Language: | en_US |
| Published: |
Boston University
2015
|
| Online Access: | https://hdl.handle.net/2144/11122 |