Building a novel nanofabrication system using MEMS
Micro-electromechanical systems (MEMS) are electrically controlled micro-machines which have been widely used in both industrial applications and scientific research. This technology allows us to use macro-machines to build micro-machines (MEMS) and then use micro-machines to fabricate even small...
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| Language: | en_US |
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2016
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| Online Access: | https://hdl.handle.net/2144/19737 |